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Team 1
EUV Lithography - New Light for the Digital Age
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Dr. rer. nat. Peter Kürz
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Dr. rer. nat. Michael Kösters
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Dr. rer. nat. Sergiy Yulin
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Das Team
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Atmosphärische Detailbilder zum Projekt
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Computer Controlled Polishing (CCP)
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Computer Controlled Polishing (CCP)
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Optikfertigung Spiegelschleifen
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Optikfertigung Spiegelschleifen
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EUV High-NA-Spiegel mit taktilem Messkopf
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EUV High-NA-Spiegel mit taktilem Messkopf
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EUV High-NA-Spiegel
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Objektiv des EUV Micro Exposure Tools (MET): weltweit die erste an Chiphersteller gelieferte EUV-Optik
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Objektiv des EUV Micro Exposure Tools (MET): weltweit die erste an Chiphersteller gelieferte EUV-Optik
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Objektiv des EUV Micro Exposure Tools (MET): weltweit die erste an Chiphersteller gelieferte EUV-Optik
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Objektiv des EUV Micro Exposure Tools (MET): weltweit die erste an Chiphersteller gelieferte EUV-Optik
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EUV High-NA-Beschichtungsanlage
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EUV High-NA-Beschichtungsanlage
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EUV High-NA-Beschichtungsanlage
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TRUMPF Hochleistungslaser für die EUV-Lichterzeugung in der Montagehalle
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Komponente des Lasersystems für die EUV-Lichterzeugung im Betrieb (erkennbar am violetten Leuchten in den 4 Sichtfenstern)
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Optischer Aufbau zur Charakterisierung des Laserstrahls
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Einzelspiegel des TRUMPF Lasers
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Komponente des TRUMPF Lasersystems für die EUV-Lichterzeugung im Reinraum
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Hochleistungsoptik zur Fokussierung des Laserstrahls auf die Zinntröpfchen
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Hochleistungsoptik zur Fokussierung des Laserstrahls auf die Zinntröpfchen
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